Semitron™ CMP LL5 PET-P
Polyethylene Terephthalate
Optimized for use in CMP retaining rings, Semitron™ CMP LL5 is a high-performance PET-P material with a superior wear life that is up to eight times greater than standard PPS when used in oxide chemistries. Its excellent wear and chemical resistance makes this specialty PET-P grade ideal for increasing the performance of CMP tools operating in temperatures up to 60°C (140°F).
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Product Information
Material Properties
- Long wearing material, 5x that of PPS
- Best performance in oxide chemistries, 8x that of PPS
- Ideal for CMP applications up to 60°C (140°F)
Available Geometries
Semitron™ CMP LL5 PET-P stock shapes encompass a range of standard sizes in the following geometries: Plate
Available Colors
Semitron™ CMP LL5 PET-P stock shapes come in the following colors: White
Regional Availability
Availability of products, shapes, and colors may differ by region.
Properties
- Long wearing material, 5x that of PPS
- Best performance in oxide chemistries, 8x that of PPS
- Ideal for CMP applications up to 60°C (140°F)
Documentation
For further regulatory documentation and absence declarations, please visit the regulatory page.
