Semitron® MPR1000 is a new engineering material developed for Semiconductor applications and more specifically for use in vacuum chamber applications such as these found in Etch, CVD and Ion Implant.
The material was developed based on three key premises:
1. Longevity - Increased life in plasma chambers over traditional plastics such as polyimide (up to 25X over polyimide in ozone)
2. Clean - Low ionic metal content and low out-gassing
3. Value - Lower overall cost in use compared to traditional materials used in vacuum chamber applications such as quartz, ceramics, and engineering plastics.